@inproceedings{601ff8061cbd49d495ce12876ce3d312,
title = "High-sensitivity CMUT with interlayer metal architecture for medical ultrasonic systems",
abstract = "This paper presents an integration of the capacitive micromachined ultrasonic transducers (CMUTs) and the transimpedance amplifier in medical ultrasound systems. The proposed CMUT and the sensing circuits are both fabricated on the same chip in a 0.18μm CMOS MEMS technology. Two interlayer metal structures are proposed to improve the sensitivity. The CMUTs are designed with 2MHz cells for medical diagnosis. The conversion efficiency of the CMUTs is 4 times and 1.8 times higher than that in the published structures.",
keywords = "CMUT, TIA, transducer, ultrasonic sensor",
author = "Cheng, {Teng Chuan} and Yu-Te Liao and Tsai, {Tsung Heng}",
year = "2015",
month = jun,
day = "21",
doi = "10.1109/TRANSDUCERS.2015.7181147",
language = "English",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1211--1214",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
address = "美國",
note = "18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
}