High Responsivity Amorphous Indium Zinc Oxide Photo Sensor For In-cell Fingerprint Identification

Yu Chuan Chiu, Jia Lin Huang, Yu Han Chen, Kai Jhih Gan, Dun Bao Ruan, Chih Chieh Hsu, Po Tsun Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Amorphous InZnO material is chosen for a phototransistor sensing layer, respectively, with a completely compatible process integrated into in-cell embedded photo sensor architecture. The photo sensor exhibits a high optical responsivity (1720 A/W) and good signal to noise ratio (~103) under the low blue light illumination.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationApplications and Technology, A and T 2022
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)9781957171050
StatePublished - 2022
EventCLEO: Applications and Technology, A and T 2022 - San Jose, United States
Duration: 15 May 202220 May 2022

Publication series

NameOptics InfoBase Conference Papers

Conference

ConferenceCLEO: Applications and Technology, A and T 2022
Country/TerritoryUnited States
CitySan Jose
Period15/05/2220/05/22

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