High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment

Tung Ming Pan, Tan Fu Lei, Wen Luh Yang, Chun Ming Cheng, Tien-Sheng Chao

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Fingerprint

Dive into the research topics of 'High quality interpoly-oxynitride grown by NH3 nitridation and N2O RTA treatment'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds