High pH stability and detection of α-synuclein using an EGFET biosensor with an HfO₂ gate deposited by high-power pulsed magnetron sputtering

In this research, hafnium oxide (HfO₂) was first fabricated in an in-house-developed high-power pulsed magnetron sputtering system (HiPIMS) functionalized for application as a high-performance extended gate field-effect transistor (EGFET) for the detection of pH and proteins associated with Parkinson's disease (PD). PD is the second most common neurodegenerative disease in elderly people after Alzheimer's disease. The α-synuclein protein in patients’ blood may be a potential biomarker in the early stage of PD. Detection of α-synuclein with high sensitivity and nonspecific binding through HfO₂-EGFET biosensors has the advantages of low cost and simple fabrication from disposable EGs. Among the duty cycle conditions tested, HfO₂ deposited at a 25% duty cycle in HiPIMS exhibited superior pH sensitivity and linearity, with values of 56.4 mV/pH and 99.7%, respectively. The hysteresis width and drift coefficient are −3 mV and 0.3 mV/h, respectively. To overcome the Debye length limitation, 100-fold diluted phosphate buffer solution and the PMOS configuration were used to determine the α-synuclein for which the isoelectric point was 4.67. The negative gate bias in the PMOS configuration successfully causes α-synuclein to approach the surface of HfO₂ EG to achieve a sensitivity of 12.1 mV/dec and a linearity of 99.5% in the range of 0.1–1000 pg/mL. The limit of detection is 0.198 pg/mL, and the immobilized surface ultimately binds specifically, resulting in low interference signals from other related biomarkers. This promising study shows that detecting various proteins involved in different diseases and performing clinical tests can be accomplished in the future.