High performance silicon N-channel gate-all-around junctionless field effect transistors by strain technology

P. J. Sung, T. C. Cho, P. C. Chen, F. J. Hou, C. H. Lai, Y. J. Lee, Yi-Ming Li, S. Samukawa, Tien-Sheng Chao, W. F. Wu, W. K. Yeh

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

In this paper, strain effects on silicon n-channel gate-all-around (GAA) jucntionless field effect transistor (JLFET) are studied. By using tensile strain SiN layer, drive currents of the JLFETs show enhancement of up to 42%. The high performance strained JLFETs exhibit superior gate control (Ion/Ioff >109) and ideal S.S. (65 mV/dec.) as a channel width scales down to 20 nm. Drive currents and leakage currents are improved simultaneously after inducing strain technology.

Original languageEnglish
Title of host publication16th International Conference on Nanotechnology - IEEE NANO 2016
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages174-175
Number of pages2
ISBN (Electronic)9781509039142
DOIs
StatePublished - 21 Nov 2016
Event16th IEEE International Conference on Nanotechnology - IEEE NANO 2016 - Sendai, Japan
Duration: 22 Aug 201625 Aug 2016

Publication series

Name16th International Conference on Nanotechnology - IEEE NANO 2016

Conference

Conference16th IEEE International Conference on Nanotechnology - IEEE NANO 2016
Country/TerritoryJapan
CitySendai
Period22/08/1625/08/16

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