High-Performance P-Type Germanium Tri-Gate FETs via Green Nanosecond Laser Crystallization and Counter Doping for Monolithic 3-D ICs

Hao Tung Chung, Yu Ming Pan, Nein Chih Lin, Bo Jheng Shih, Chih Chao Yang, Chang Hong Shen, Huang Chung Cheng, Kuan Neng Chen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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