High-performance GAA sidewall-damascened sub-10-nm in situ n+-doped poly-Si NWs channels junctionless FETs

  • Po Yi Kuo*
  • , Yi Hsien Lu
  • , Tien-Sheng Chao
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

26 Scopus citations

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Chemical Engineering