High performance and high reliability polysilicon thin-film transistors with multiple nano-wire channels

Keyphrases

• High Performance 100%
• Polycrystalline Silicon Thin-film Transistors (poly-Si TFTs) 100%
• High Reliability 100%
• Nanowire Channel 100%
• Multiple Nanowire 100%
• Performance Reliability 100%
• Poly-Si 50%
• Electrical Characteristics 50%
• Multi-channel 50%
• Tri-gate 50%
• Gate Structure 50%
• Drain Induced Barrier Lowering 50%
• Steep Subthreshold Slope 50%
• On-off Ratio 50%
• NH3 Plasma 50%
• Passivated 50%
• Gate Control 50%
• Lightly Doped Drain 50%
• Nanowire Structure 50%
• Grain Boundary Defects 50%
• Channel Splitting 50%
• Kink Effect 50%
• Low Poly 50%

Chemical Engineering

• Polysilicon 100%
• Film 100%
• Nanowire 100%