High-performance and high-reliability 80-nm gate-length DTMOS with indium super steep retrograde channel

Sun Jay Chang*, Chun Yen Chang, Coming Chen, Tien-Sheng Chao, Yao Jen Lee, Tiao Yuan Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

18 Scopus citations


In this paper, we demonstrate for the first time a high-performance and high-reliability 80-nm gate-length dynamic threshold voltage MOSFET (DTMOS) using indium super steep retrograde channel implantation. Due to the steep indium super steep retrograde (In-SSR) dopant profile in the channel depletion region, the novel In-SSR DTMOS features a low Vth in the off-state suitable for low-voltage operation and a large body effect to fully exploit the DTMOS advantage simultaneously, which is not possible with conventional DTMOS. As a result, excellent 80-nm gate length transistor characteristics with drive current as high as 348 fj,\Jfj,m (off-state current 40 nA//j,m), a record-high Gm = 1022 mS/mm, and a subthreshold slope of 74 mV/dec, are achieved at 0.7 V operation. Moreover, the reduced body effects that have seriously undermined conventional DTMOS operation in narrow-width devices are alleviated in the In-SSR DTMOS, due to reduced indium dopant segregation. Finally, it was found for the first time that hot-carrier reliability is also improved in DTMOS-mode operation, especially for In-SSR DTMOS.

Original languageEnglish
Pages (from-to)2379-2384
Number of pages6
JournalIEEE Transactions on Electron Devices
Issue number12
StatePublished - 1 Dec 2000


  • Indium
  • Super-steep-retrograde (SSR) channel


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