High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications

  • Hang Hu*
  • , Shi Jin Ding
  • , H. F. Lim
  • , Chunxiang Zhu
  • , M. F. Li
  • , S. J. Kim
  • , X. F. Yu
  • , J. H. Chen
  • , Y. F. Yong
  • , Byung Jin Cho
  • , D. S.H. Chan
  • , Subhash C. Rustagi
  • , M. B. Yu
  • , C. H. Tung
  • , Anyan Du
  • , Doan My
  • , P. D. Foo
  • , Albert Chin
  • , Dim Lee Kwong
    • *Corresponding author for this work

    Research output: Contribution to journal › Conference article › peer-review

    40 Scopus citations

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