Abstract
Base doping densities near 1020cm-3 and emitter doping densities near 7 × 1017cm-3 have been achieved in MOVPE HBT structures and combined with self-aligned processing resulting in fmax = 94 GHz and ft = 45 GHz. To our knowledge, these are the first MOVPE HBTs demonstrated to operate at millimetre-wave frequencies.
Original language | English |
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Pages (from-to) | 1124-1125 |
Number of pages | 2 |
Journal | Electronics Letters |
Volume | 25 |
Issue number | 17 |
DOIs | |
State | Published - 3 Aug 1989 |
Keywords
- Bipolar devices
- Epitaxy
- Semiconductor devices and materials
- Transistors