High-Efficiency Long-Working-Distance Back-Side Vertical Grating Coupler for Photonic Integration

Shi Chieh Hsu, Yi Jang Hsu*, Yinchieh Lai

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We design and analyze several high-efficiency long-working-distance back-side vertical grating couplers for photonic integration through the substrate. Such grating coupling devices can be used to ease the on-chip optical coupling with top-down flip-chip packaging.

Original languageEnglish
Title of host publicationOECC/PSC 2022 - 27th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784885523366
DOIs
StatePublished - 2022
Event27th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing, OECC/PSC 2022 - Toyama, Japan
Duration: 3 Jul 20226 Jul 2022

Publication series

NameOECC/PSC 2022 - 27th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing 2022

Conference

Conference27th OptoElectronics and Communications Conference/International Conference on Photonics in Switching and Computing, OECC/PSC 2022
Country/TerritoryJapan
CityToyama
Period3/07/226/07/22

Keywords

  • Diffraction gratings
  • silicon photonics
  • subwavelength structures

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