High area-efficient ESD clamp circuit with equivalent RC-based detection mechanism in a 65-nm CMOS process

A power-rail electrostatic discharge (ESD) clamp circuit realized with ESD clamp device drawn in the layout style of big field-effect transistor (BigFET), and with parasitic diode of BigFET as a part of ESD-transient detection mechanism, is proposed and verified in a 65-nm 1.2-V CMOS process. Skillfully utilizing the diode-connected MOS transistor as the equivalent large resistor and the parasitic reverse-biased diodes of BigFET as the equivalent capacitors, the new RC-based ESD-transient detection mechanism can be achieved without using an actual resistor and capacitor to significantly reduce the layout area by ∼82%, as compared to the traditional RC-based ESD-transient detection circuit. From the measured results, the new proposed power-rail ESD clamp circuit with body effect of ESD clamp device can perform adjustable holding voltage under the ESD stress condition, as well as better immunity against mistrigger and transient-induced latch-on under fast power-on and transient noise conditions.