HfO 2 MIS capacitor with copper gate electrode

Tsu Hsiu Perng*, Chao-Hsin Chien, Ching Wei Chen, Ming Jui Yang, Peer Lehnen, Chun Yen Chang, Tiao Yuan Huang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

4 Scopus citations

Fingerprint

Dive into the research topics of 'HfO 2 MIS capacitor with copper gate electrode'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds