Guided three-dimensional molecular self-assembly on silicon substrates

We demonstrate three-dimensional (3D) self-assemble growth of the metallothionein (Mn,Cd-MT-2) molecules on patterned semiconductor substrates. The MT molecules deposited on the patterned substrates were found to grow into 3D rod or ring-type nanostructures, depending on the shape of patterned nanostructures on the substrates. Dense arrays of 3D molecular nanorods or rings with an area density close to 10¹⁰ cm^-2 were demonstrated with a pore size of 20 nm and a pitch size of 100 nm. Those engineered molecular nanostructures provide an excellent opportunity for biological applications, sensing sources of nanodevices, biochemical reactions on surfaces, and even single molecule studies.