Growth, dielectric properties, and memory device applications of ZrO 2 thin films

Debashis Panda, Tseung-Yuen Tseng*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

234 Scopus citations

Fingerprint

Dive into the research topics of 'Growth, dielectric properties, and memory device applications of ZrO 2 thin films'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds

Physics & Astronomy