Keyphrases
Zirconium Dioxide
100%
Dielectric Properties
100%
Memory Device
100%
Device Application
100%
ZrO2 Thin Films
100%
Silica
66%
ZrO2 Films
33%
Resistive Random Access Memory (ReRAM)
33%
ZrO2-SiO2
33%
Nonvolatile Flash Memory
33%
Poly-Si
16%
Flash Memory Devices
16%
Ultrathin
16%
High-k Dielectric
16%
Dielectric
16%
Low Power
16%
High-speed Low-power
16%
Gate Dielectric
16%
Electrical Properties
16%
Aluminum Oxide
16%
Dynamic Random Access Memory
16%
Bottom Electrode
16%
Electrode Materials
16%
Dielectric Layer
16%
Buffer Layer
16%
Deposition Methods
16%
CMOS Devices
16%
Top Electrode
16%
Device Technology
16%
Complementary Metal Oxide Semiconductor
16%
Downscaling
16%
Memory Application
16%
Material Properties
16%
Non-volatile Memory
16%
Metal Layer
16%
Metal-oxide-semiconductor Devices
16%
Metal Nanocrystals
16%
Microelectronics
16%
Metal Oxide
16%
Charge Trapping Layer
16%
Memory Stacking
16%
Microelectronics Industry
16%
Si-based
16%
Ge Nanocrystals
16%
Si-SiO2
16%
Resistive Switching Properties
16%
Switching Parameters
16%
Property Parameters
16%
Doped Metals
16%
Doping Elements
16%
Metal Doping
16%
SiGe Nanocrystals
16%
Oxide Ion Conductor
16%
Material Science
Thin Films
100%
Dielectric Property
100%
Zirconia
100%
Dielectric Material
40%
Film
20%
Oxide Compound
10%
Al2O3
10%
Charge Trapping
10%
Buffer Layer
10%
Conductor
10%
Complementary Metal-Oxide-Semiconductor Device
10%
Materials Property
10%
Semiconductor Doping
10%