Well-aligned nanotip arrays were fabricated via a self-masking dry etching technique in an electron cyclotron resonance (ECR) plasma process. Nanotip arrays of Si, poly silicon, GaN, GaP, sapphire, and Al were fabricated. Simultaneous etching of the substrate and formation of silicon carbide (SiC) protecting caps are attributed to the nanotip formation. The ultra-low turn-on field for electron field emission as well as the surface enhanced Raman Spectroscopic study of Si nanotips is also demonstrated.
|Number of pages||8|
|Journal||International Journal of Nanoscience|
|State||Published - Oct 2005|
- Chemical vapor deposition
- Electron cyclotron resonance
- Field emission
- Surface-enhanced Raman spectroscopy