Ge nanodot-mediated densification and crystallization of low-pressure chemical vapor deposited Si3N4 for advanced complementary metal-oxide-semiconductor photonics and electronics applications
- Kang Ping Peng
- , Tsung Lin Huang
- , Tom George
- , Horng Chih Lin
- , Pei Wen Li
Research output: Contribution to journal › Article › peer-review
4
Scopus
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