Gate material dependence of process charging damage in thin gate oxide

A. Acovic*, A. Ray, J. Sun, J. Herman, T. Furukawa, R. Geiger, K. Beyer, V. McGahay, S. Greco, W. Abadeer

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

1 Scopus citations

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Engineering & Materials Science