GaN/mirror/Si light-emitting diodes for vertical current injection by laser lift-off and wafer bonding techniques

Dong Sing Wuu*, Shun Cheng Hsu, Shao Hua Huang, Chia Cheng Wu, Chia En Lee, Ray-Hua Horng

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

51 Scopus citations

Abstract

A p-side-up GaN/mirror/Si light-emitting diode (LED) for vertical current injection has been fabricated by laser lift-off and wafer bonding techniques. A variety of metallic mirrors (Au, Al, and Ag) were chosen to improve the optical reflectivity and contact resistance with n-GaN. The GaN/mirror/Si LED with a silver mirror achieved a maximum luminance intensity of 45mcd (20 mA) with a low forward voltage of 3.5V. This luminance intensity is over two times that of the original planar GaN/sapphire LED. Under high current injection, the GaN/mirror(Ag)/Si LED also showed a more stable emission wavelength than the planar GaN/sapphire LED. This can be explained by the fact that the Si substrate provides a good heat sink and alleviates the joule heating problem. On the basis of these results, the p-side-up structure confirms the possibility of the simultaneous realization of a lower contact resistance and higher reflectivity for GaN/mirror/Si LEDs.

Original languageEnglish
Pages (from-to)5239-5242
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number8 A
DOIs
StatePublished - Aug 2004

Keywords

  • Gan
  • Laser lift-off
  • Light-emitting diodes
  • Si substrate
  • Vertical conductance
  • Wafer bonding

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