TY - GEN
T1 - Functionalization of nanoscaled 2 nm-thick ALD-HfO2 layer by rapid thermal annealing and CF4 plasma for LAPS NH4 + detection
AU - Yang, Jung Hsiang
AU - Lu, Tseng Fu
AU - Wang, Jer Chyi
AU - Pijanswska, Dorota G.
AU - Chin, Chi Hang
AU - Lue, Cheng En
AU - Yang, Chia Ming
AU - Lai, Chao Sung
PY - 2011
Y1 - 2011
N2 - In this work, discussing the detection of NH4+ ion based on LAPS with functionalized 2 nm-thick ALD-HfO2 film using RTA and CF4 plasma is demonstrated. The annealing treatment at 500, 700, and 900C were performed on ALD-HfO2 film and the plasma treatment for 1, 3, and 5 min were performed on ALD-HfO2 film with 900C annealing. In the results, the response for NH4+ ion detection was decreased with increasing annealing temperature and increased with increasing plasma time. The optimum sensitivity of 37.28mV/pNH4 was achieved with 900C annealing and 5 min CF4 plasma.
AB - In this work, discussing the detection of NH4+ ion based on LAPS with functionalized 2 nm-thick ALD-HfO2 film using RTA and CF4 plasma is demonstrated. The annealing treatment at 500, 700, and 900C were performed on ALD-HfO2 film and the plasma treatment for 1, 3, and 5 min were performed on ALD-HfO2 film with 900C annealing. In the results, the response for NH4+ ion detection was decreased with increasing annealing temperature and increased with increasing plasma time. The optimum sensitivity of 37.28mV/pNH4 was achieved with 900C annealing and 5 min CF4 plasma.
KW - ammonium ion (NH)
KW - and carbon tetrafluoride (CF) plasma
KW - light addressable potentiometric sensor (LAPS)
KW - rapid thermal annealing (RTA)
UR - http://www.scopus.com/inward/record.url?scp=80052120110&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2011.5969270
DO - 10.1109/TRANSDUCERS.2011.5969270
M3 - Conference contribution
AN - SCOPUS:80052120110
SN - 9781457701573
T3 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
SP - 2118
EP - 2121
BT - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
T2 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Y2 - 5 June 2011 through 9 June 2011
ER -