TY - GEN
T1 - Frequency responses of on-chip pressure sensor with different deformation chambers
AU - Tsai, Chia-Hung
AU - Kaneko, Makoto
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2016/3/21
Y1 - 2016/3/21
N2 - The frequency responses of a previously proposed on-chip pressure sensor is investigated with two different sizes of deformation chamber. Pressure inputs with the same span of frequencies, from 1 Hz to 64 Hz, are applied to the fabricated pressure sensors, and the pressure sensed by the on-chip sensor is represented by the movement of microbeads inside the sensing area. We found that the sensor with a larger deformation chamber leads to a greater microbeads movement where the peak-to-peak distance is around 50 μm while the one with a smaller chamber is less than 10 μm. Thus, it is concluded that a larger deformation chamber gives a better pressure resolution.
AB - The frequency responses of a previously proposed on-chip pressure sensor is investigated with two different sizes of deformation chamber. Pressure inputs with the same span of frequencies, from 1 Hz to 64 Hz, are applied to the fabricated pressure sensors, and the pressure sensed by the on-chip sensor is represented by the movement of microbeads inside the sensing area. We found that the sensor with a larger deformation chamber leads to a greater microbeads movement where the peak-to-peak distance is around 50 μm while the one with a smaller chamber is less than 10 μm. Thus, it is concluded that a larger deformation chamber gives a better pressure resolution.
UR - http://www.scopus.com/inward/record.url?scp=84966587128&partnerID=8YFLogxK
U2 - 10.1109/MHS.2015.7438310
DO - 10.1109/MHS.2015.7438310
M3 - Conference contribution
AN - SCOPUS:84966587128
T3 - 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
BT - 2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
Y2 - 23 November 2015 through 25 November 2015
ER -