Formation of epitaxial silicide in silicon nanowires

Yi-Chia Chou, Kuo Chang Lu, King-Ning Tu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

1 Scopus citations
Original languageEnglish
Title of host publicationSilicon and Silicide Nanowires
Subtitle of host publicationApplications, Fabrication and Properties
PublisherPan Stanford Publishing Pte. Ltd.
Pages187-243
Number of pages57
ISBN (Electronic)9789814303477
ISBN (Print)9789814303460
DOIs
StatePublished - 30 Sep 2013

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