Formation of epitaxial silicide in silicon nanowires

Yi-Chia Chou, Kuo Chang Lu, King-Ning Tu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

1 Scopus citations
Original languageEnglish
Title of host publicationSilicon and Silicide Nanowires
Subtitle of host publicationApplications, Fabrication and Properties
PublisherPan Stanford Publishing Pte. Ltd.
Number of pages57
ISBN (Electronic)9789814303477
ISBN (Print)9789814303460
StatePublished - 30 Sep 2013

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