Formation of 0.1-μm n+p junction by As+ implantation through Pt or PtSi film

Bing-Yue Tsui*, Mao Chieh Chen

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Formation of 0.1-μm n+p junction by As+ implantation through Pt or PtSi film'. Together they form a unique fingerprint.

Physics & Astronomy