Formation and composition of titanium oxinitride nanocrystals synthesized via nitridizing titanium oxide for nonvolatile memory applications

Li Wei Feng, Chun-Yen Chang, Ting Chang Chang, Chun Hao Tu, Pai-Syuan Wang, Chao Cheng Lin, Chen Min Chen, Hui Chun Huang, Der Shin Gan, New Jin Ho, Shih Ching Chen, Shih Cheng Chen

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