Flexible electret energy harvesters with parylene electret on PDMS substrates

Yi Chiu*, Shih Hsien Wu

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations


Currently, most vibrational energy harvesters have rigid and resonant structures to harvest energy from periodic motions in specific directions. However, in some situations the motion is random and aperiodic; or the targeted energy source is the strain energy in deformation, rather than the kinetic energy in vibration. Therefore we propose and demonstrate a PDMS-based flexible energy harvester with parylene-C electret that can be attached to any deformable surfaces to harvest the stain energy caused by external deformation. The proposed flexible harvester was fabricated and characterized. The measured power at 20 Hz is 0.18 μW and 82 nW in the compression and bending modes, respectively. Such a harvester has the potential for wearable and implantable electronics applications.

Original languageEnglish
Article number012037
JournalJournal of Physics: Conference Series
Issue number1
StatePublished - 2013
Event13th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2013 - London, United Kingdom
Duration: 3 Dec 20136 Dec 2013


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