Flat and robust out-of-plane vibrational electret energy harvester

Yi Chiu, Yen Chieh Lee

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87 Scopus citations


This paper reports the design, fabrication and testing of two types of out-of-plane electret energy harvesters. Copper plates and flexible printed circuit board (FPCB) were used to fabricate the harvesters for a lower fabrication cost and a more robust structure. Several dielectric materials were investigated and SiO2/Si3N4 double layers were found to have better charge stability. The measured surface potential and charge density of the SiO2/Si3N4 electret were -400 V and 13.5 mC m-2, respectively. It was found that charge stability could be improved by multiple corona charging cycles. Using SiO2/Si 3N4 as the electret material, the measured power output was 20.7 μW at 110 Hz for 2 G acceleration with a 50 MΩ load for the copper harvester and 0.82 μW at 172 Hz for 2 G acceleration with a 30 MΩ load for the FPCB harvester.

Original languageEnglish
Article number015012
JournalJournal of Micromechanics and Microengineering
Issue number1
StatePublished - Jan 2013


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