First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3D Integration with Dual Workfunction Gate for Ultra Low-power SRAM and RF Applications

S. W. Chang, T. H. Lu, C. Y. Yang, C. J. Yeh, M. K. Huang, C. F. Meng, P. J. Chen, T. H. Chang, Y. S. Chang, J. W. Jhu, T. Z. Hong, C. C. Ke, X. R. Yu, W. H. Lu, M. A. Baig, T. C. Cho, P. J. Sung, C. J. Su, F. K. Hsueh, B. Y. ChenH. H. Hu, C. T. Wu, K. L. Lin, W. C.Y. Ma, D. D. Lu, K. H. Kao, Y. J. Lee, C. L. Lin, K. P. Huang, K. M. Chen, Yi-Ming Li, S. Samukawa, Tien-Sheng Chao, G. W. Huang, W. F. Wu, W. H. Lee, J. Y. Li, J. M. Shieh, Jenn-Hwan Tarng, Y. H. Wang, Wen-Kuan Yeh*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

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