First Demonstration of Heterogeneous IGZO/Si CFET Monolithic 3D Integration with Dual Workfunction Gate for Ultra Low-power SRAM and RF Applications
S. W. Chang, T. H. Lu, C. Y. Yang, C. J. Yeh, M. K. Huang, C. F. Meng, P. J. Chen, T. H. Chang, Y. S. Chang, J. W. Jhu, T. Z. Hong, C. C. Ke, X. R. Yu, W. H. Lu, M. A. Baig, T. C. Cho, P. J. Sung, C. J. Su, F. K. Hsueh, B. Y. ChenH. H. Hu, C. T. Wu, K. L. Lin, W. C.Y. Ma, D. D. Lu, K. H. Kao, Y. J. Lee, C. L. Lin, K. P. Huang, K. M. Chen, Yi-Ming Li, S. Samukawa, Tien-Sheng Chao, G. W. Huang, W. F. Wu, W. H. Lee, J. Y. Li, J. M. Shieh, Jenn-Hwan Tarng, Y. H. Wang, Wen-Kuan Yeh*
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
6Scopus
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