| Original language | English |
|---|---|
| Patent number | 6852549 |
| State | Published - 8 Feb 2005 |
FERROELECTRIC THIN FILM PROCESSING FOR FERROELECTRIC FIELD-EFFECT TRANSISTOR
Albert Chin (Inventor), San-Yuan Chen (Inventor)
Research output: Patent
Albert Chin (Inventor), San-Yuan Chen (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | 6852549 |
| State | Published - 8 Feb 2005 |