Original language | English |
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Patent number | 6852549 |
State | Published - 8 Feb 2005 |
FERROELECTRIC THIN FILM PROCESSING FOR FERROELECTRIC FIELD-EFFECT TRANSISTOR
Albert Chin (Inventor), San-Yuan Chen (Inventor)
Research output: Patent
Albert Chin (Inventor), San-Yuan Chen (Inventor)
Research output: Patent
Original language | English |
---|---|
Patent number | 6852549 |
State | Published - 8 Feb 2005 |