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Ferroelectric Properties of HZO Ferroelectric Capacitors with Various Capping Electrodes and Annealing Conditions
Jing Wei Lin, Yan Kui Liang, Yu Chen, Zhen Hao Li, Tsung Che Chiang, Po Tsun Liu, Edward Yi Chang, Chun Hsiung Lin
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
1
Scopus
citations