Feasibility of Ge double quantum dots with high symmetry and tunability in size and inter-dot spacing

Keyphrases

• Silicon Nitride 100%
• Higher Symmetries 100%
• Double Quantum Dot 100%
• High Tunability 100%
• Thermal Oxidation 66%
• Poly-SiGe 66%
• Quantum Dots 33%
• Nanopatterning 33%
• Spacer Layer 33%
• Sidewall 33%
• Tunability 33%
• Germanium Quantum Dots 33%
• Oxidation Time 33%
• Spherical Shape 33%
• Self-alignment 33%
• Selective Oxidation 33%
• Self-organization 33%
• Quantum Dots Size 33%
• Close Proximity 33%
• Etch Back 33%
• Alignment Approach 33%
• Spacer Technology 33%
• Spherical Quantum Dot 33%
• Coupled Quantum Dots 33%
• External Electrodes 33%
• Nanoridge 33%
• Organizational Alignment 33%