Fast transistor threshold voltage measurement method for high-speed, high-accuracy advanced process characterization

Tseng Chin Luo, Chia-Tso Chao, Huan Chi Tseng, Masaharu Goto, Philip A. Fisher, Yuan Yao Chang, Chi Min Chang, Takayuki Takao, Katsuhito Iwasaki, Cheng Mao Lee

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

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Engineering