@inproceedings{cfab0817c09647fba91cadd194094cda,
title = "Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation",
abstract = "One of the limits of a conventional multiphoton microfabrication is its low throughput due to the sequential nature of scanning process. In this study, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to provide freeform polymer microstructures fast. The system integrates a 10 kHz repetition rate ultrafast amplifier featuring strong instantaneous peak power (maximum 400 μJ/pulse at 90 fs pulse width) with a digital micromirror device generating designed patterns at the focal plane. As the result, three-dimensional freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking up two-dimensional (2D) structures layer-by-layer. The size of each 2D fabrication area can be larger than 100 × 100 μm2. Compared with scanning process or fixed mask pattern generation, this approach provides two-or three-fold fabrication speed and freeform microstructures. Furthermore, the system is capable of optical sectioning the fabricated microstructures for providing 3D inspection.",
keywords = "Microstructure, Multiphoton microfabrication, Patterned generation, Spatiotemporal focusing",
author = "Li, {Y. C.} and Cheng, {L. C.} and Lien, {C. H.} and Chang, {C. Y.} and Yen, {W. C.} and Shean-Jen Chen",
year = "2012",
month = dec,
day = "1",
doi = "10.1117/12.930307",
language = "English",
isbn = "9780819492067",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Polymer Optics and Molded Glass Optics",
note = "Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II ; Conference date: 15-08-2012 Through 16-08-2012",
}