Fast-IV measurement investigation of the role of TiN gate nitrogen concentration on bulk traps in HfO2 layer in p-MOSFETs

  • Ying Hsin Lu
  • , Ting Chang Chang
  • , Jih Chien Liao
  • , Li Hui Chen
  • , Yu Shan Lin
  • , Ching En Chen
  • , Kuan Ju Liu
  • , Xi Wen Liu
  • , Chien Yu Lin
  • , Chen Hsin Lien
  • , Tseung-Yuen Tseng
  • , Osbert Cheng
  • , Cheng Tung Huang
  • , Wei Ting Yen

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

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Engineering