Fabrication of Vertically Stacked Nanosheet Junctionless Field-Effect Transistors and Applications for the CMOS and CFET Inverters

Po-Jung Sung, Shu-Wei Chang, Kuo-Hsing Kao, Chien-Ting Wu, Chun-Jung Su, Ta-Chun Cho, Fu-Kuo Hsueh, Wen-Hsi Lee, Yao-Jen Lee*, Tien-Sheng Chao

*Corresponding author for this work

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Engineering & Materials Science

Chemical Compounds