@inproceedings{a7dad5322d1f4d388b35ada59fd99d50,
title = "Fabrication of SiC membrane HCG blue reflector using nanoimprint lithography",
abstract = "We designed and fabricated a suspended SiC-based membrane high contrast grating (HCG) reflectors. The rigorous coupled-wave analysis (RCWA) was employed to verify the structural parameters including grating periods, grating height, filling factors and air-gap height. From the optimized simulation results, the designed SiC-based membrane HCG has a wide reflection stopband (reflectivity (R) <90%) of 135 nm for the TE polarization, which centered at 480 nm. The suspended SiC-based membrane HCG reflectors were fabricated by nanoimprint lithography and two-step etching technique. The corresponding reflectivity was measured by using a micro-reflectivity spectrometer. The experimental results show a high reflectivity (R<90%), which is in good agreement with simulation results. This achievement should have an impact on numerous III-N based photonic devices operating in the blue wavelength or even ultraviolet region.",
keywords = "HCG, III-N, Nanoimprint, SiC",
author = "Lai, {Ying Yu} and Akihiro Matsutani and Tien-chang Lu and Wang, {Shing Chung} and Fumio Koyama",
year = "2015",
doi = "10.1117/12.2077391",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Weimin Zhou and Fumio Koyama and Chang-Hasnain, {Connie J.} and David Fattal",
booktitle = "High Contrast Metastructures IV",
address = "美國",
note = "High Contrast Metastructures IV ; Conference date: 11-02-2015 Through 12-02-2015",
}