Fabrication of omega-gated negative capacitance finfets and SRAM

P. J. Sung, C. J. Su, D. D. Lu, S. X. Luo, K. H. Kao, J. Y. Ciou, C. Y. Jao, H. S. Hsu, C. J. Wang, T. C. Hong, T. H. Liao, C. C. Fang, Y. S. Wang, H. F. Huang, J. H. Li, Y. C. Huang, F. K. Hsueh, C. T. Wu, W. C.Y. Ma, K. P. HuangY. J. Lee*, Tien-Sheng Chao, J. Y. Li, W. F. Wu, W. K. Yeh, Y. H. Wang

*Corresponding author for this work

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Engineering & Materials Science

Chemical Compounds