Fabrication of multianalyte CeO₂ nanograin electrolyte-insulator-semiconductor biosensors by using CF₄ plasma treatment

Multianalyte CeO₂ biosensors have been demonstrated to detect pH, glucose, and urine concentrations. To enhance the multianalyte sensing capability of these biosensors, CF₄ plasma treatment was applied to create nanograin structures on the CeO₂ membrane surface and thereby increase the contact surface area. Multiple material analyses indicated that crystallization or grainization caused by the incorporation of flourine atoms during plasma treatment might be related to the formation of the nanograins. Because of the changes in surface morphology and crystalline structures, the multianalyte sensing performance was considerably enhanced. Multianalyte CeO₂ nanograin electrolyte-insulator-semiconductor biosensors exhibit potential for use in future biomedical sensing device applications.