Fabrication of GeSn Nanowire MOSFETs by Utilizing Highly Selective Etching Techniques

Tzu Chieh Hong, Wen Hsiang Lu, Yeong Her Wang, Jiun Yun Li, Yao Jen Lee*, Tien Sheng Chao

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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Engineering & Materials Science

Chemical Compounds