Fabrication of Biodegradable Soft Tissue-Mimicked Microelectrode Arrays for Implanted Neural Interfacing

Wei Chen Huang*, Wan Lou Lei, Chih Wei Peng

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper reports a method to fabricate biodegradable, adhesive and soft tissue-compliant microelectrode arrays (MEAs). MEAs composed of polylactic acid (PLA) biodegradable insulation layers and Pt/PLA hybrid electrodes can be fabricated in a batch by photolithography with a tunable photoresist/developer composition. The coordinated sacrificial layer dissolution and interfacial adhesion driven by an adhesive hydrogel enable directly transfer printing Pt-PLA MEAs stacks. This integrated process will allow, for first time, the batch production of implanted hydrogel MEAs composed of metal/organic composites as conformal electrodes and fully biodegradable insulation layers to show significantly lower impedance (0.1-2.5 kΩ) at 1 kHz as compared with those reported from most literatures. This device enables the success of both in-vivo site-specific neural stimulation and recording.

Original languageEnglish
Title of host publication2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages392-395
Number of pages4
ISBN (Electronic)9781665493086
DOIs
StatePublished - 2023
Event36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023 - Munich, Germany
Duration: 15 Jan 202319 Jan 2023

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2023-January
ISSN (Print)1084-6999

Conference

Conference36th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2023
Country/TerritoryGermany
CityMunich
Period15/01/2319/01/23

Keywords

  • Biodegradable electronics
  • Hydrogel electronics
  • Microelectrode arrays
  • Neural interfaces
  • Platinum
  • Polylactic acid (PLA)
  • Transfer printing

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