Fabrication and field-emission characteristics of TiN nanorods with a concave top surface

Te Ming Chen*, Jui Yi Hung, Fu-Ming Pan, Li Chang, Jeng-Tzong Sheu, Shich Chuan Wu

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

Well-ordered titanium nitride nanorods were fabricated by reactive ion etch using titanium oxide nanodots as the mask, which were prepared using the anodic aluminum oxide templation method. The TiN nanorods exhibited a concave top surface with a protruding edge. Due to the protruding top edge and a high aspect ratio, the TiN nanorods showed a low turn-on voltage of 1.6 Vμm. The ellipsoidal cylinder model was used to evaluate the field-enhancement effect of the protruding edge, and an underestimation by ∼26% was found as compared with the enhancement factor derived from the Fowler-Nordheim plot.

Original languageEnglish
Pages (from-to)K40-K43
Number of pages4
JournalElectrochemical and Solid-State Letters
Volume11
Issue number4
DOIs
StatePublished - Jan 2008

Fingerprint

Dive into the research topics of 'Fabrication and field-emission characteristics of TiN nanorods with a concave top surface'. Together they form a unique fingerprint.

Cite this