Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

Chung Ming Wang; Chia Hao Kuo; Horng-Chih Lin; Tiao Yuan Huang

doi:10.1109/INEC.2011.5991723

Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

Chung Ming Wang^*, Chia Hao Kuo, Horng-Chih Lin, Tiao Yuan Huang

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH₃ monitoring. We can observe the detection signals, including V_th and drain current, when the NH₃ is introduced.

Original language	English
Title of host publication	4th IEEE International NanoElectronics Conference, INEC 2011
DOIs	https://doi.org/10.1109/INEC.2011.5991723
State	Published - 26 Sep 2011
Event	4th IEEE International Nanoelectronics Conference, INEC 2011 - Tao-Yuan, Taiwan Duration: 21 Jun 2011 → 24 Jun 2011

Publication series

Name	Proceedings - International NanoElectronics Conference, INEC
ISSN (Print)	2159-3523

Conference

Conference	4th IEEE International Nanoelectronics Conference, INEC 2011
Country/Territory	Taiwan
City	Tao-Yuan
Period	21/06/11 → 24/06/11

Keywords

gas sensor
nanowire TFT
Suspended

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10.1109/INEC.2011.5991723

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@inproceedings{83d6a79e89964550b22ea24fcbceea54,

title = "Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application",

abstract = "In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.",

keywords = "gas sensor, nanowire TFT, Suspended",

author = "Wang, {Chung Ming} and Kuo, {Chia Hao} and Horng-Chih Lin and Huang, {Tiao Yuan}",

year = "2011",

month = sep,

day = "26",

doi = "10.1109/INEC.2011.5991723",

language = "English",

isbn = "9781457703799",

series = "Proceedings - International NanoElectronics Conference, INEC",

booktitle = "4th IEEE International NanoElectronics Conference, INEC 2011",

note = "4th IEEE International Nanoelectronics Conference, INEC 2011 ; Conference date: 21-06-2011 Through 24-06-2011",

}

Wang, CM, Kuo, CH, Lin, H-C & Huang, TY 2011, Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application. in 4th IEEE International NanoElectronics Conference, INEC 2011., 5991723, Proceedings - International NanoElectronics Conference, INEC, 4th IEEE International Nanoelectronics Conference, INEC 2011, Tao-Yuan, Taiwan, 21/06/11. https://doi.org/10.1109/INEC.2011.5991723

Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application. / Wang, Chung Ming; Kuo, Chia Hao; Lin, Horng-Chih et al.
4th IEEE International NanoElectronics Conference, INEC 2011. 2011. 5991723 (Proceedings - International NanoElectronics Conference, INEC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

AU - Wang, Chung Ming

AU - Kuo, Chia Hao

AU - Lin, Horng-Chih

AU - Huang, Tiao Yuan

PY - 2011/9/26

Y1 - 2011/9/26

N2 - In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.

AB - In this paper, we have fabricated a novel TFT with suspended NW channels and used such device for NH3 monitoring. We can observe the detection signals, including Vth and drain current, when the NH3 is introduced.

KW - gas sensor

KW - nanowire TFT

KW - Suspended

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U2 - 10.1109/INEC.2011.5991723

DO - 10.1109/INEC.2011.5991723

M3 - Conference contribution

AN - SCOPUS:80052985513

SN - 9781457703799

T3 - Proceedings - International NanoElectronics Conference, INEC

BT - 4th IEEE International NanoElectronics Conference, INEC 2011

T2 - 4th IEEE International Nanoelectronics Conference, INEC 2011

Y2 - 21 June 2011 through 24 June 2011

ER -

Fabrication and characterization of a suspended nanowire thin film transistor for gas sensor application

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Keywords

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