Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface

Yen Hui Hsieh; Yen Jun Huang; Jian Yu Shih; Jih-Perng Leu; Kuan-Neng Chen

doi:10.1109/TCPMT.2017.2786031

Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface

Yen Hui Hsieh, Yen Jun Huang, Jian Yu Shih, Jih-Perng Leu, Kuan-Neng Chen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal-organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal-organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal-organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal-polymer interfaces for seeking proper combination in heterogeneous integration.

Original language	English
Article number	8258991
Pages (from-to)	195-201
Number of pages	7
Journal	IEEE Transactions on Components, Packaging and Manufacturing Technology
Volume	8
Issue number	2
DOIs	https://doi.org/10.1109/TCPMT.2017.2786031
State	Published - Feb 2018

Keywords

Adhesion
heterogeneous integration
metal
polymer

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10.1109/TCPMT.2017.2786031

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@article{23ce9ce3413d4473b54934b2afc58934,

title = "Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface",

abstract = "A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal-organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal-organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal-organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal-polymer interfaces for seeking proper combination in heterogeneous integration.",

keywords = "Adhesion, heterogeneous integration, metal, polymer",

author = "Hsieh, {Yen Hui} and Huang, {Yen Jun} and Shih, {Jian Yu} and Jih-Perng Leu and Kuan-Neng Chen",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.",

year = "2018",

month = feb,

doi = "10.1109/TCPMT.2017.2786031",

language = "English",

volume = "8",

pages = "195--201",

journal = "IEEE Transactions on Components, Packaging and Manufacturing Technology",

issn = "2156-3950",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2",

}

TY - JOUR

T1 - Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface

AU - Hsieh, Yen Hui

AU - Huang, Yen Jun

AU - Shih, Jian Yu

AU - Leu, Jih-Perng

AU - Chen, Kuan-Neng

PY - 2018/2

Y1 - 2018/2

N2 - A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal-organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal-organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal-organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal-polymer interfaces for seeking proper combination in heterogeneous integration.

AB - A method is built for describing the relationship between adhesion strength and chemical states of Co/polymer and Cr/polymer interfaces. Based on the chemical bonding model, the adhesion strength is confirmed to be dominated by the metal-organic complex at the interfaces. For Cr/polymers interfaces, the formation of metal-organic complex is restricted by the oxidation of metal atoms during deposition, which leads to almost no variation in adhesion from low [benzocyclobutene(BCB)] to high (AZ 4620) oxygenated polymers. On the other hand, a strong adhesion is observed at the Co/BCB interface that arises from the metal-organic bonds associated with hydroxyl groups in the polymer. The method is expected to provide clear analysis to other metal-polymer interfaces for seeking proper combination in heterogeneous integration.

KW - Adhesion

KW - heterogeneous integration

KW - metal

KW - polymer

UR - http://www.scopus.com/inward/record.url?scp=85041233668&partnerID=8YFLogxK

U2 - 10.1109/TCPMT.2017.2786031

DO - 10.1109/TCPMT.2017.2786031

M3 - Article

AN - SCOPUS:85041233668

SN - 2156-3950

VL - 8

SP - 195

EP - 201

JO - IEEE Transactions on Components, Packaging and Manufacturing Technology

JF - IEEE Transactions on Components, Packaging and Manufacturing Technology

IS - 2

M1 - 8258991

ER -

Exploring the Correspondence between Chemical States and Adhesion Property for Cr, Co Metal/AZ 4620, BCB Polymer Interface

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