Experimentally effective clean process to C-V characteristic variation reduction of HKMG MOS devices

Chien Hung Chen, Yiming Li, Chieh Yang Chen, Yu Yu Chen, Sheng Chia Hsu, Wen Tsung Huang, Sheng Yuan Chu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Chemical Compounds

Engineering & Materials Science

Physics & Astronomy