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Evaluation of plasma charging damage in ultrathin gate oxides
Horng-Chih Lin*, Chi Chun Chen, Chao-Hsin Chien, Szu Kang Hsein, Meng Fan Wang, Tien-Sheng Chao, Tiao Yuan Huang, Chun Yen Chang
*Corresponding author for this work
Research output: Contribution to journal › Review article › peer-review
28
Scopus
citations