ESD Research of SCR Devices under Harsh Environments

Chien Chun Lin, Chun Yu Lin*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


In prior technology, system-level electrostatic discharge (ESD) tests under environment change conditions mainly focused on testing the effect of a high-temperature environment. i.e., the effect on internal circuits of heat generated outside. However, few studies have explored the effect of ambient relative humidity changes on integrated circuits (ICs). Therefore, this study will analyze the performance of various ESD protection components under high ambient temperature and high ambient relative humidity. The ESD protection devices are tested for the ESD robustness of the silicon-controlled rectifiers (SCR) under a harsh environment and the measurement results are discussed and verified in the CMOS process.

Original languageEnglish
Article number6182
Issue number18
StatePublished - Sep 2023


  • electrostatic discharge
  • relative humidity (RH)
  • silicon-controlled rectifiers


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