Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

T. C. Chang*, S. T. Yan, Po-Tsun Liu, Z. W. Lin, H. Aoki, S. M. Sze

*Corresponding author for this work

Research output: Contribution to journal › Comment/debate

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