Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

T. C. Chang; S. T. Yan; Po-Tsun Liu; Z. W. Lin; H. Aoki; S. M. Sze

doi:10.1016/j.tsf.2004.05.002

Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

T. C. Chang^*
, S. T. Yan
, Po-Tsun Liu
, Z. W. Lin
, H. Aoki
, S. M. Sze

^*Corresponding author for this work

Department of Photonics

Research output: Contribution to journal › Comment/debate

Original language	English
Pages (from-to)	342-342
Number of pages	1
Journal	Thin Solid Films
Volume	467
Issue number	1-2
DOIs	https://doi.org/10.1016/j.tsf.2004.05.002
State	Published - 22 Nov 2004

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10.1016/j.tsf.2004.05.002

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title = "Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))",

author = "Chang, \{T. C.\} and Yan, \{S. T.\} and Po-Tsun Liu and Lin, \{Z. W.\} and H. Aoki and Sze, \{S. M.\}",

year = "2004",

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doi = "10.1016/j.tsf.2004.05.002",

language = "English",

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T1 - Erratum

T2 - Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

AU - Chang, T. C.

AU - Yan, S. T.

AU - Liu, Po-Tsun

AU - Lin, Z. W.

AU - Aoki, H.

AU - Sze, S. M.

PY - 2004/11/22

Y1 - 2004/11/22

UR - https://www.scopus.com/pages/publications/4444270791

U2 - 10.1016/j.tsf.2004.05.002

DO - 10.1016/j.tsf.2004.05.002

M3 - Comment/debate

AN - SCOPUS:4444270791

SN - 0040-6090

VL - 467

SP - 342

EP - 342

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Erratum: Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Thin Solid Films (2004) 447-448 (516-523))

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