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Epitaxial germanium on soi substrate and its application of fabricating high i on IOFF ratio Ge FinFETs
Cheng Ting Chung, Che Wei Chen, Jyun Chih Lin, Che Chen Wu, Chao-Hsin Chien, Guang Li Luo, Chi Chung Kei, Chien Nan Hsiao
Research output: Contribution to journal › Article › peer-review
13
Scopus
citations