Enhancing the performance of germanium channel nMOSFET using phosphorus dopant segregation

Che Wei Chen, Ju Yuan Tzeng, Cheng Ting Chung, Hung Pin Chien, Chao-Hsin Chien, Guang Li Luo, Pei Yu Wang, Bing-Yue Tsui

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15 Scopus citations

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Engineering

Material Science